Design and preparation of mid-infrared bandpass filter

Citation

陈朝平 (CHEN Chao-ping), 师建涛 (SHI Jian-tao), 郭 芮 (GUO Rui), 白 波 (BAI Bo), 杨崇民 (YANG Chong-min), 郭鸿香 (GUO Hong-xiang). 中红外带通滤光片的设计与制备 (Design and preparation of mid-infrared bandpass filter) [J]. 应用光学 (Journal of Applied Optics), 2012, 33(3): 595-598.

Keywords

• 中红外带通滤光片 / Mid-infrared bandpass filter
• 薄膜 / Thin films
• 离子辅助沉积 / Ion beam assisted deposition - IBAD
• 通带半宽度 /Full width at half maximum - FWHM
• 峰值透过率 / Peak transmission
• 锗 / Germanium - Ge
• 硫化锌 / Zinc sulfide - ZnS
• 航天 / Aerospace
• 气象 / Meteorology
• 遥感 / Remote sensing
• 光学薄膜 / Optical thin films
• 膜系结构 /Film structure
• 镀膜材料 / Coating materials
• 基底 / Substrate - Ge
• λ/4堆 / λ/4 stack
• 中心波长 / Central wavelength/Peak wavelength
• F-P结构 / Fabry-Pérot structure
• 匹配层 / Matching layer
• 相对带宽 / Relative bandwidth
• ZJSX-1100镀膜机 / ZJSX-1100 coating machine
• 电子枪热蒸发 / Electron beam evaporation
• 预镀中间层 / Pre-coating intermediate layer
• 过渡层 / Transition layer
• 膜厚仪 / Film thickness monitor - IC5
• 光谱性能 / Spectral performance
• 膜层致密 / Dense film layer
• 附着力 / Adhesion
• 膜层应力 / Film stress
• 透射光谱 / Transmission spectrum
• 减反射膜 / Anti-reflection film
• 稳定性 / Stability
• 湿度实验 / Humidity experiment

Brief

This article discusses the design and successful preparation of a mid-infrared bandpass filter using Ge and ZnS materials on a Ge substrate via ion-assisted deposition, achieving a peak transmittance of over 87% and a通带半宽度 (FWHM) of 70nm with good optical stability and film properties.

Summary

This article details the design and successful preparation of a mid-infrared bandpass filter using Germanium (Ge) and Zinc Sulfide (ZnS) materials on a Ge substrate, employing ion-assisted deposition. The fabricated filter achieved a peak transmittance of over 87% and a 通带半宽度 (FWHM) of 70nm, demonstrating good optical stability and film properties. The design utilized an F-P structure with matching layers to enhance performance.

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