Optical Spectra and Surface Morphologies of Near-Infrared Narrow Band-Pass Filters Using Dual Ion Beam Sputtering

Optical Spectra and Surface Morphologies of Near-Infrared Narrow Band-Pass Filters Using Dual Ion Beam Sputtering

Citation

陈刚 [Chen Gang], 刘定权 [Liu Dingquan], 马冲 [Ma Chong], 王凯旋 [Wang Kaixuan], 张莉 [Zhang Li], 高凌山 [Gao Lingshan]. 双离子束溅射制备近红外窄带通滤光片的光谱和表面形貌 [Optical Spectra and Surface Morphologies of Near-Infrared Narrow Band-Pass Filters Using Dual Ion Beam Sputtering]. 光学学报 (Acta Optica Sinica), 2020, 40(11): 2131001.

Keywords

  • 近红外窄带通滤光片 /Near-infrared narrow band-pass filters
  • 双离子束溅射 / Dual ion beam sputtering - DIBS
  • Nb2O5 / Niobium pentoxide
  • SiO2 / Silicon dioxide
  • 蓝宝石 (Al2O3) 基片 / Sapphire substrate
  • 中心波长 / Central wavelength
  • 带宽 / Bandwidth
  • 透过率 / Transmittance
  • 表面形貌 / Surface morphology
  • 表面粗糙度 / Surface roughness
  • 膜系设计 / Film system design
  • 电子束蒸镀 / Electron beam evaporation
  • 薄膜缺陷 / Thin film defects
  • 截止带 / Stop band / Rejection band
  • 光耦合 / Optical coupling

Brief

This article reports on the design and fabrication of near-infrared narrow band-pass filters with center wavelengths of 1375nm and 1610nm using dual ion beam sputtering (DIBS) of Nb2O5 and SiO2 thin films on sapphire substrates, demonstrating improved surface quality and uniformity compared to electron beam evaporation.

Summary

This paper details the design and fabrication of near-infrared narrow band-pass filters with central wavelengths at 1375 nm and 1610 nm on sapphire substrates using dual ion beam sputtering (DIBS) of Nb2O5 and SiO2 thin films. The filters achieved high transmittance (95%) and good out-of-band rejection. Importantly, DIBS produced filters with significantly improved surface quality (roughness below 1 nm) and fewer defects compared to electron beam evaporation (IBAD), leading to better uniformity when coupled with photodetectors. The filters are intended for atmospheric monitoring of water vapor, methane, and carbon dioxide.

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