Study and preparation of mid － infrared dual channel band － pass filter

Study and preparation of mid － infrared dual channel band － pass filter

Citation

王松林 (WANG Song － lin)，米高园 (MI Gao － yuan)，张建付 (ZHANG Jian － fu)，杨崇民 (YANG Chong － min)，刘青龙 (LIU Qing － long)，王颖辉 (WANG Ying － hui)，韩 俊 (HAN Jun). 中波红外双通道带通滤光片的研制 (Study and preparation of mid － infrared dual channel band － pass filter) [J]. 激 光 与 红 外 (Laser & Infrared), 2017, 47(6): 740-744.

Keywords

  • 中波红外 / Mid-wave infrared
  • 双通道带通滤光片 / Dual channel band-pass filters
  • 带通滤光膜 / Band-pass filter film
  • 负滤光膜 / Negative filter film
  • 截止带 / Rejection zone/Cut-off band
  • 透过率 / Transmittance
  • 单晶锗 / Ge substrate
  • 锗 / Ge
  • 硫化锌 / ZnS
  • 电子束蒸发 / Electron beam evaporation
  • 膜层厚度 / Film thickness
  • 蒸发角 / Evaporation angle
  • 膜系设计 / Film system design
  • 光谱性能 / Spectral property
  • 通带 / Passband
  • 次峰 / Second peaks
  • 膜堆 / Film stack
  • 霍尔离子源 / Hall ion source

Brief

This article details the design and preparation of a mid-wave infrared dual-channel bandpass filter by depositing a band-pass filter film on one side of a Ge substrate and a negative filter film on the other, achieving good transmission and cut-off properties, although experimental results showed some deviations due to manufacturing errors.

Summary

This article details the design and fabrication of a mid-wave infrared dual-channel bandpass filter by depositing a bandpass filter film on one side of a germanium (Ge) substrate and a negative filter film on the other. The study achieved good passband transmittance and cut-off depth, but experimental results showed some deviations in the rejection zone with secondary peaks and a slight shift due to evaporation angle changes and accumulated film thickness errors during the deposition process.

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