
The Development of Front Film System for 6.5~14μm Infrared Long-wave Pass Filter
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Citation
朱铄金 (Zhu Shuojin), 朱丽慧 (Zhu Lihui), 黄清伟 (Huang Qingwei). 6.5~14μm红外长波通滤光片正面膜系的研制 (The Development of Front Film System for 6.5~14μm Infrared Long-wave Pass Filter) [J]. 光学仪器 (Optical Instruments), 2023, 45(1): [Page numbers not available in the excerpt].
Keywords
- 红外 / Infrared
- 长波通滤光片 / Long-wave pass filter
- 正面膜系 / Front film system
- 规整膜系 / Regular film system
- 通带波纹 / Passband ripple
- 光学薄膜分析软件 / Optical thin film analysis software
- 优化 / Optimization
- 热电阻真空蒸发镀膜工艺 / Thermal resistance vacuum evaporation coating process
- 通带 / Passband
- 平均透过率 / Average transmittance
- 截止带 / Stopband
- 截止带边缘陡度 / Cut-off edge steepness
- 工艺简单 / Simple process
- 膜厚监控 / Film thickness monitoring
- 工业大规模生产 / Industrial mass production
- 红外传感器 / Infrared sensor
- 膜系设计 / Film system design
- 非规整膜系 / Non-regular film system
- 光学特性 / Optical properties
- 初始膜系 / Initial film system
- 周期性对称的截止膜系 / Periodic symmetric stop film system
- 等效折射率理论 / Equivalent refractive index theory)
- 红外光谱仪 / Infrared spectrometer
- 矩阵法 / Matrix method
- 光谱特性 / Spectral characteristics
Brief
This article describes the design and fabrication of a front film system for a 6.5~14μm infrared long-wave pass filter by optimizing a regular film system, achieving a flat passband with high average transmittance and good cut-off slope, suitable for industrial mass production.
Summary
This article describes the development of a front film system for a 6.5~14μm infrared long-wave pass filter. Researchers started with a regular film system and used optical thin film analysis software to selectively optimize some of its layers to reduce significant passband ripples. The resulting design, fabricated using thermal resistance vacuum evaporation coating, achieved a flat passband with an average transmittance of over 90% in the working waveband and a strong cut-off in the specified range with good edge steepness. This optimized film system is characterized by a simple process and easy film thickness monitoring, making it suitable for industrial mass production.
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