Optical Characteristics of Silicon Thin Film in Short-Wave Infrared Band and 1.30μm Bandpass Optical Filter

Optical Characteristics of Silicon Thin Film in Short-Wave Infrared Band and 1.30μm Bandpass Optical Filter

Citation

段微波 (Duan Weibo), 庄秋慧 (Zhuang Qiuhui), 李大琪 (Li Daqi), 陈刚 (Chen Gang), 余德明 (Yu Deming), & 刘定权 (Liu Dingquan). (2012). 硅薄膜的短波红外光学特性和 １．３０μｍ带通滤光片 [Optical Characteristics of Silicon Thin Film in Short-Wave Infrared Band and 1.30μm Bandpass Optical Filter]. 光学学报 (Acta Optica Sinica), 32(10), 31001-1-31001-4. https://doi.org/10.3788/AOS201232.1031001

Keywords

  • 硅薄膜 / Silicon Thin Film
  • 短波红外 / Short-Wave Infrared, 1～3μm
  • 光学特性 / Optical Characteristics
  • 折射率高 /High Refractive Index
  • 透明性好 / Good Transparency
  • 应力易匹配 / Easy to Match Stress
  • Selmeier 模型 / Selmeier Model
  • 带通滤光片 / Bandpass Filter
  • 1.30μm
  • 相对带宽 / Relative Bandwidth, 2.46%
  • 二氧化硅 / Silicon Dioxide, SiO2
  • 带外截止 / Out-of-Band Rejection
  • 半功率带宽 / Half Power Bandwidth, 約 32nm
  • 双谐振腔 / Two Cavities
  • 峰值透射率 / Peak Transmittance
  • 蓝宝石 / Sapphire

Brief

This article details the investigation of the short-wave infrared optical properties of silicon thin films and the subsequent design and fabrication of a 1.30μm bandpass filter using silicon and silicon dioxide, achieving a bandpass with a broad out-of-band rejection range extending to 1.75μm.

Summary

This article investigates the optical properties of silicon thin films in the short-wave infrared (1-3μm) region, highlighting its advantages like high refractive index and good transparency. Utilizing an improved Selmeier model, the authors designed and fabricated a  using silicon and silicon dioxide with. This filter achieved a  and a. The use of silicon's absorption at wavelengths smaller than 1.0μm effectively extended the . The fabricated filter also demonstrated good stability after undergoing various reliability tests.

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