Proceedings of the National Academic Symposium on Thin Film Technology

Citation

张德靖 (Zhang Dejing), 马勉军 (Ma Mianjun), 叶自煌 (Ye Zihuang), 王多书 (Wang Duoshu). 窄带宽截止长波红外滤光片制作 [Fabrication of Narrow Bandwidth Cut-off Long-wave Infrared Filters]. 全国薄膜技术学术研讨会论文摘要集 [Proceedings of the National Academic Symposium on Thin Film Technology], [Year of the conference if available], [Page numbers within the proceedings].

Keywords

  • 窄带宽截止长波红外滤光片 / Narrow bandwidth cut-off long-wave infrared filter
  • 长波通 / Long-wave pass
  • 短波通 / Short-wave pass
  • 高信噪比的会聚光红外光学系统 / High signal-to-noise ratio converging beam infrared optical system
  • 光控系统 / Optical control system
  • 光学监控法 / Optical monitoring method
  • 膜厚监控 / Thin film thickness monitoring
  • 膜层厚度 / Film layer thickness
  • 等离子体辅助沉积工艺 / Plasma-assisted deposition technology
  • 高稳定性 / High stability
  • 波长范围 / Wavelength range
  • 带宽 / Bandwidth
  • 抑制带截止深度 / Rejection band cut-off depth
  • 平均透射率 / Average transmittance
  • 光谱特性 / Spectral characteristics
  • 红外滤光片 / Infrared filter

Brief

The article describes the design and fabrication of narrow bandwidth cut-off long-wave infrared filters using a combination of long-wave pass and short-wave pass films, employing precise optical monitoring and plasma-assisted deposition for high stability.

Summary

This article details the fabrication of narrow bandwidth cut-off long-wave infrared filters by combining long-wave pass and short-wave pass thin films. The process utilizes a high signal-to-noise ratio converging beam infrared optical system with optical control for precise film thickness monitoring. Furthermore, plasma-assisted deposition technology is employed to achieve high stability in the resulting filters, which exhibit specific wavelength range, bandwidth, rejection band cut-off depth, and average transmittance. This aligns with our previous TLDR which highlighted the design and fabrication aspects using these techniques to achieve stable filters with specific spectral properties.

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