Development of Ultra-High Steepness Edge Long Wave Pass Raman Filter
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Citation
白皓宇 (BAI Hao-yu), 姚春龙 (YAO Chun-long), 董 明 (DONG Ming), 秦 瑞 (QIN Rui), 白永浩 (BAI Yong-hao), 王奕楠 (WANG Yi-nan). 超高陡度长波通拉曼滤光片的研制 (Development of Ultra-High Steepness Edge Long Wave Pass Raman Filter) [J]. 真空 (VACUUM), 2024, 61(4): 12-16.
Keywords
- 长波通滤光片 / Long wave pass filter
- 陡度 / Steepness
- 拉曼光谱仪 / Raman spectrometer
- 瑞利散射光 / Rayleigh scattering light
- 拉曼检测 / Raman detection
- 磁控溅射 / Magnetron sputtering
- 超多膜层 / Ultra-multiple film layers
- 膜厚控制 / Film thickness control
- 通带波纹 / Passband ripple
- 低波数拉曼检测 / Low wavenumber Raman detection
- 532 nm 激光 / 532 nm laser
- 膜系设计 / Film system design
- 周期性对称膜系 / Periodic symmetric film system
- 高折射率材料 / High refractive index material) - Ta2O5
- 低折射率材料 / Low refractive index material) - SiO2
- Essential Macleod / Optical thin film design software
- Simplex 优化方法 / Simplex optimization method
- Conjugate Gradient 优化方法 / Conjugate Gradient optimization method
- Optimac 优化方法 / Optimac optimization method
- 膜厚误差 / Film thickness error
- 多监控片联合监控 / Multi-monitor wafer combined monitoring
- 多波长监控 / Multi-wavelength monitoring
Brief
This article describes the design and fabrication of an ultra-high steepness long wave pass Raman filter using magnetron sputtering and advanced thin film design and control techniques, achieving steepness better than 0.5% and enabling low wavenumber Raman detection near a 532 nm laser.
Summary
This article focuses on the development of an ultra-high steepness long wave pass filter for Raman spectroscopy using magnetron sputtering. The researchers designed a multi-layer film system and employed advanced optimization and high-precision film thickness control techniques to achieve a steepness better than 0.5% and a passband ripple better than 4%. This enables low wavenumber Raman detection down to 100 cm-1 near a 532 nm laser, which is crucial for improved detection accuracy and range in Raman spectroscopy.
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