Bandpass Filters for Wafer Inspection

The bandpass filters (BPFs) used in wafer inspection are highly specialized, very narrow filters with a Center Wavelength (CWL) precisely matching the powerful, monochromatic light sources (typically lasers) employed by the inspection tools.

The specific parameters (Wavelength and FWHM) depend entirely on the inspection technique, the wafer layer being examined, and the size of the defects being targeted.
Bandpass Filters for Wafer Inspection
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Filters

4 items
Center Wavelength (nm)
FWHM (nm)
Optical Density(OD)

Filter

Center Wavelength (nm)
FWHM (nm)
Optical Density(OD)